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EUV Tech builds the at-wavelength metrology tools that let the world's chipmakers see what their extreme ultraviolet lithography lines are actually doing. Founded in 1997 and headquartered in Martinez, California, the company supplies reflectometers, pellicle measurement systems, phase-imaging tools and SuMMIT software to every major semiconductor foundry running EUV. In 2023 it raised a Series A led by Intel Capital.

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semiconductormetrologyeuvextreme-ultravioletlithographysoft-x-ray