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EUV Tech
EUV Tech builds the at-wavelength metrology tools that let the world's chipmakers see what their extreme ultraviolet lithography lines are actually doing. Founded in 1997 and headquartered in Martinez, California, the company supplies reflectometers, pellicle measurement systems, phase-imaging tools and SuMMIT software to every major semiconductor foundry running EUV. In 2023 it raised a Series A led by Intel Capital.
Patrick Naulleau
Patrick Naulleau is the CEO of EUV Tech Inc., a Martinez, California-based company leading the development of at-wavelength extreme ultraviolet (EUV) metrology tools for semiconductor manufacturing. With over 25 years of pioneering work in EUV lithography — including helping build the world's first EUV scanner at Lawrence Berkeley National Laboratory and co-developing the SHARP EUV mask microscope — Naulleau transitioned from world-class researcher to industry CEO in 2022. He holds a PhD in Electrical Engineering from the University of Michigan, is a Fellow of both Optica and SPIE, and has authored over 400 publications. EUV Tech raised a $36M Series A led by Intel Capital in 2023.