metrology
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Patrick Naulleau
Patrick Naulleau is the CEO of EUV Tech Inc., a Martinez, California-based company leading the development of at-wavelength extreme ultraviolet (EUV) metrology tools for semiconductor manufacturing. With over 25 years of pioneering work in EUV lithography — including helping build the world's first EUV scanner at Lawrence Berkeley National Laboratory and co-developing the SHARP EUV mask microscope — Naulleau transitioned from world-class researcher to industry CEO in 2022. He holds a PhD in Electrical Engineering from the University of Michigan, is a Fellow of both Optica and SPIE, and has authored over 400 publications. EUV Tech raised a $36M Series A led by Intel Capital in 2023.
Jared O'Leary
Jared O'Leary is the Co-Founder and CEO of SirenOpt, a deep-tech startup commercializing PlasmaSens - a manufacturing intelligence platform that uses cold atmospheric plasma and AI to perform real-time, non-destructive materials characterization. A Stanford Chemical Engineering graduate with a Ph.D. from UC Berkeley, O'Leary spun SirenOpt out of his doctoral research with advisor Professor Ali Mesbah in 2022. The platform can generate 213,000 data points per measurement in milliseconds without destroying the sample, targeting battery manufacturing, aerospace, semiconductors, and other advanced manufacturing sectors. SirenOpt has raised $16.1M total, including a $6.5M strategic round led by Hitachi Ventures and JLR's InMotion Ventures in 2025, plus a $2.4M California Energy Commission BRIDGE grant for battery electrode applications.