# Onto Innovation

> Onto Innovation makes the inspection, metrology, lithography and factory software used to control semiconductor manufacturing from bare wafers through advanced packaging. Its machines find defects, measure structures from nanometer-scale transistors to package interconnects and turn fab data into process decisions, helping chipmakers raise yield and reliability as AI, high-bandwidth memory and chiplet designs become harder to manufacture.

- **Founded:** 2019
- **Headquarters:** Wilmington, Massachusetts, United States
- **Team size:** Approximately 1,615 employees worldwide as of January 3, 2026
- **Products:** Dragonfly inspection and metrology systems, Atlas optical metrology systems, Firefly G3 system, JetStep lithography systems, Discover software suite
- **Notable:** Formed in October 2019 through the merger of Nanometrics and Rudolph Technologies, combining decades of metrology, inspection, lithography and software expertise., Reached record fiscal-year revenue of $1.0053 billion in 2025., Reported record quarterly revenue of $291.9 million in the first quarter of 2026.

## Products & services

- **Dragonfly inspection and metrology systems** — Automated high-speed 2D defect inspection and 3D metrology for advanced packaging, specialty devices and front-end quality assurance; the G5 generation targets submicron defects and high-resolution 3D measurement.
- **Atlas optical metrology systems** — Optical critical-dimension and thin-film metrology for advanced logic and memory structures; Atlas G6 was selected in 2026 for gate-all-around metrology.
- **Firefly G3 system** — Automated inspection and integrated 3D metrology for advanced IC substrates and panel-level packaging.
- **JetStep lithography systems** — Large-field steppers for advanced IC substrates and fan-out panel-level packaging, including the X500 and S3500 systems.
- **Discover software suite** — Factory software for defect management, equipment monitoring, automated classification, run-to-run control, recipe management and yield analysis.
- **Ai Diffract OCD software** — Modeling and compute tools for offline recipe development, on-tool analysis and fleet-scale optical metrology workloads.
- **Materials analysis systems** — Inline contamination monitoring and material-interface characterization capabilities acquired from Semilab International.
- **Service, applications support and training** — Global installation, maintenance, spare parts, applications engineering and expert-led customer training for production systems.

## Achievements

- Formed in October 2019 through the merger of Nanometrics and Rudolph Technologies, combining decades of metrology, inspection, lithography and software expertise.
- Reached record fiscal-year revenue of $1.0053 billion in 2025.
- Reported record quarterly revenue of $291.9 million in the first quarter of 2026.
- Won a volume purchase agreement estimated above $240 million from a leading HBM manufacturer for Dragonfly inspection and bump metrology through 2027.
- Opened the U.S.-based Packaging Applications Center of Excellence in 2024 for collaborative panel-level packaging development.
- Qualified the Dragonfly G5 at leading 2.5D logic and high-bandwidth-memory customers in 2026.
- Expanded into materials composition and electrical analysis by completing the acquisition of selected Semilab product lines in 2025.

## Latest updates

- **2026-05** — Reported record first-quarter revenue of $291.9 million; Dragonfly G5 qualified at leading 2.5D logic and HBM customers, while Atlas G6 gained a second logic customer for gate-all-around metrology.
- **2026-05** — Priced an upsized $1.3 billion offering of 0% convertible senior notes due 2031.
- **2026-04** — Announced a strategic X-ray process-control collaboration with Rigaku and an agreement to purchase a 27% ownership stake for approximately $710 million.
- **2026-02** — Reported record 2025 revenue of $1.0053 billion and disclosed a volume agreement worth more than $240 million with a leading HBM manufacturer.
- **2025-11** — Completed the acquisition of selected materials-analysis product lines from Semilab International.
- **2024-09** — Opened the Packaging Applications Center of Excellence for panel-level packaging and advanced chiplet R&D.

## Links

- Website: https://ontoinnovation.com
- LinkedIn: https://www.linkedin.com/company/onto-innovation
- Facebook: https://www.facebook.com/ontoinnovation

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Profile page: https://yespress.io/onto-innovation
Published by YesPress — https://yespress.io
Last updated: 2026-08-13