# EUV Tech

> EUV Tech builds the at-wavelength metrology tools that let the world's chipmakers see what their extreme ultraviolet lithography lines are actually doing. Founded in 1997 and headquartered in Martinez, California, the company supplies reflectometers, pellicle measurement systems, phase-imaging tools and SuMMIT software to every major semiconductor foundry running EUV. In 2023 it raised a Series A led by Intel Capital.

- **Founded:** 1997
- **Headquarters:** Martinez, California, United States
- **Founders:** Patrick Naulleau (CEO (appointed 2022); previously Director, Center for X-Ray Optics at Lawrence Berkeley National Laboratory)
- **Team size:** ~110 employees
- **Products:** EUV Reflectometers, EUV Pellicle Tools, EUV N&K and Phase Measurement Tool, Actinic Image Review System, Lithometrix / SuMMIT Software Suite
- **Notable:** Founded 1997 - predates production EUV lithography by roughly two decades., Appointed Dr. Patrick Naulleau as CEO in 2022., Delivered the EUV N&K and Phase Measurement tool to customers in H2 2022.

## Products & services

- **EUV Reflectometers** — At-wavelength reflectivity measurement systems for multilayer mirrors, masks and optics used in EUV lithography.
- **EUV Pellicle Tools** — Transmission and deflection measurement systems for the thin protective membranes that shield EUV photomasks.
- **EUV N&K and Phase Measurement Tool** — Multi-use actinic metrology tool delivered to customers starting in late 2022 for measuring optical constants and phase response of EUV materials.
- **Actinic Image Review System** — EUV mask defect review and zoneplate microscopy using actual 13.5 nm illumination rather than e-beam proxies.
- **Lithometrix / SuMMIT Software Suite** — Software for line-edge roughness, line-width roughness, and CD analysis from SEM imagery.
- **EUV Measurement Services** — In-house contract measurement using EUV Tech's own tools for customers who don't operate their own at-wavelength lab.

## Achievements

- Founded 1997 - predates production EUV lithography by roughly two decades.
- Appointed Dr. Patrick Naulleau as CEO in 2022.
- Delivered the EUV N&K and Phase Measurement tool to customers in H2 2022.
- Closed Series A led by Intel Capital in March 2023.
- Grew from ~70 to roughly 110 employees in the wake of the Series A.

## Latest updates

- **2023-03** — Series A funding round led by Intel Capital announced; Sean Doyle joins board.
- **2022-10** — Dr. Patrick Naulleau named CEO.
- **2022-12** — EUV N&K and Phase Measurement tool shipped to first customers.

## Links

- Website: https://euvtech.com
- LinkedIn: https://www.linkedin.com/company/euv-tech

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Profile page: https://yespress.io/euv-tech
Published by YesPress — https://yespress.io
Last updated: 2026-05-29